Tegal receives repeat Japan order

Aug. 4, 2005 — Tegal Corp. (Nasdaq: TGAL), a designer and manufacturer of plasma etch and deposition systems for the production of integrated circuits and nanotechnology devices, announced the sale of a 901ACS diode plasma etch system to a supplier of automotive electronics devices in Japan.

The tool introduces Tegal’s Advanced Control System architecture to a facility with an installed base of other tools used for etching silicon devices in the production of anti-locking brake sensors.


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