Oct. 5, 2005 – Amtech Systems Inc. (Nasdaq:ASYS), a supplier of production and automation systems and related supplies for the semiconductor, silicon wafer, solar cell and MEMS sectors, announced two new orders for its Tempress brand diffusion furnaces totaling $1.2 million. The orders are from a customer that produces solar cells in China and a German research institute.
As a result of the orders the company says its backlog will be approximately $14 million. The furnace for the German research institute will be designed for POCL3 deposition and plasma deposition on some of the largest (150 mm x 300 mm and 210 mm square) silicon wafers used in the development of solar cells. Amtech says the Chinese customer intends to use the device for production.