Oct. 5, 2005 — Tegal Corp. (Nasdaq:TGAL) announced it had shipped an Endeavor AT PVD cluster tool to be used by a leading analog and mixed signal device supplier. The devices are used in a wide variety of wireless, networking and cell phone applications. The tool, valued at $1.2 million, is being shipped to a foundry in China that will produce the devices for the U.S.-based company. Tegal says it is the first Endeavor system to be used for device production in China.
The Endeavor AT PVD tool deposits films with low to zero stress values in an extremely clean process environment. They are used in manufacturing advanced power devices, photo masks, light emitting diodes, and electro-acoustic devices made using MEMS processes.