MKS Instruments to acquire Umetrics

December 16, 2005 – MKS Instruments Inc. has entered into an agreement to acquire privately held Umetrics AB, Umea, Sweden, a provider of multivariate data analysis and modeling software for semiconductor and other manufacturing processes. Terms of the transaction were not disclosed, and MKS says the acquisition, which is expected to close in 1Q06, is not expected to materially affect its near-term financial results.

The acquisition strengthens the alliance between the two companies to enable advanced process control by linking MKS’ process monitoring, process control and digital connectivity technologies with Umetrics’ process analysis technology.

Umetrics is a provider of multivariate data analysis and modeling software that transforms statistical and mathematical data into application- focused information for improving on-line and batch process yields in diverse industries.

Leo Berlinghieri, MKS’ Chief Executive Officer and President, said, “I am pleased that our partnership with Umetrics has expanded beyond our exclusive license agreement, and they will be part of our Instruments and Control Systems product group.”


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