Dec. 7, 2005 — Veeco Instruments Inc. (Nasdaq:VECO), a Woodbury, N.Y., maker of metrology tools and process equipment, announced that it has introduced the Dimension Atomic Force Profiler (AFP).
The device is designed for a broad range of metrology applications in the semiconductor fab. Veeco says it combines the resolution of an atomic force microscope with the long-scan capability of an atomic force profiler to offer semiconductor manufacturers a high performance, fast AFM solution for in-line process control.
Specific metrology applications for which it is suitable include chemical mechanical planarization, etch depth, step heights, roughness and die maps for advanced technology nodes.