Jan. 12, 2006 — Accent Optical Technologies, a supplier of lattice engineering and photolithography process control tools, announced the deployment of its Caliper elan 300mm overlay tool in AMD’s new Fab 36 production facility in Dresden, Germany.
The company said that the tool extends Accent’s 90nm technology Caliper platform to 65nm and beyond, incorporating advances in measurement technology and throughput. The tool’s nanometer level precision and tool-to-tool matching capability satisfied the performance requirements needed for the AMD Athlon 64 and next generation device processes, according to an Accent release.