DongbuAnam selects Mattson’s Low-K Strip Tool for DSP chip manufacturing

Aspen III eHighlands supports widest range of strip applications for cost-effective production and development

January 25, 2006 — /PRNewswire-FirstCall/ — FREMONT, Calif. — Mattson Technology, Inc. (NASDAQ:MTSN) , a leading supplier of advanced process equipment used to manufacture semiconductors, today announced the shipment of its Aspen III eHighlands low-k/copper strip system to DongbuAnam Semiconductor, Korea’s largest pure-play foundry. The eHighlands will be used in 90 nm back-end-of- line (BEOL) strip applications, including BARC (bottom antireflection coating) etchback, trench and via ashing, to produce DSP (digital signal processing) chips for cellular phones. DongbuAnam will also use the tool to develop advanced sub-70 nm BEOL applications, including low-k strip, barrier removal and copper clean steps.

“For versatile and competitive foundry operations, we need suppliers who can address a wide range of application needs and offer strong local support,” said Dr. Heung Joon Park, senior executive vice president for DongbuAnam Semiconductor. “We chose Mattson, an equipment provider known for its leading strip technologies and excellent support services, because the Aspen III eHighlands strip system delivers the high productivity, low cost-of-ownership and platform extendibility we need for high-volume production and development of our most advanced chips.”

“Building on the proven strip and RTP systems already installed at DongbuAnam, the Aspen III eHighlands was selected as a result of the higher technology and cost advantages the system provided over a long-standing incumbent supplier,” said J. W. Kim, Mattson Technology’s Korea country manager. “The eHighlands’ ability to extend beyond conventional dry strip applications gives DongbuAnam greater process flexibility to expand its foundry offerings, and we look forward to helping our customer leverage our leading strip technologies to address the most challenging BEOL processes, including copper/low-k integration, at the 90 nm node and below.”

The Aspen III eHighlands meets all critical requirements for copper/low-k dielectric integration, ultra-low-k ashing and barrier layer removal, as well as FEOL applications and other BEOL dry strip challenges with a single tool. With a low-pressure regime, the eHighlands provides improved profile control, low-k material preservation and a wider process window. Available in 200 mm and 300 mm versions, the system builds on the production-proven Aspen III Highlands and is designed for reliable, high-productivity, low cost-of- ownership manufacturing for 90 nm and below.

About DongbuAnam Semiconductor

DongbuAnam Semiconductor, one of the largest pure-play wafer foundries in the world, specializes in world-class CMOS wafer processing that enables system-on-chip implementations that integrate the most advanced logic, analog, and mixed-signal technologies. Through close working relationships with strategic partners, DongbuAnam offers a broad range of services that augment its world-class wafer manufacturing capabilities. DongbuAnam is a key global supplier within Korea’s well-established semiconductor manufacturing infrastructure. The company’s stock trades on the Korea Stock Exchange under the stock code 001830. For more information, visit

About Mattson Technology, Inc.

Mattson Technology, Inc. is the leading supplier of dry strip equipment and the second largest supplier of rapid thermal processing equipment in the global semiconductor industry. The company’s strip and RTP equipment utilize innovative technology to deliver advanced processing performance and productivity gains to semiconductor manufacturers worldwide for the fabrication of current- and next-generation devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet:

Mattson Technology Contact
Lauren Vu
Mattson Technology, Inc.
tel +1-510-492-6518
fax +1-510-492-2800
[email protected]

Source: Mattson Technology, Inc.

CONTACT: Lauren Vu of Mattson Technology, Inc., +1-510-492-6518, or fax,
+1-510-492-2800, or [email protected]

Web site:


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