ATMI, TEL seal resist dispensing deal

February 22, 2006 – ATMI and Tokyo Electron Ltd. (TEL) are codeveloping a bag-in-a-bottle package system specifically for direct pressure dispensing of advanced photoresist chemicals, to be used with TEL’s next-generation pump system.

The PDMPak system, an extension of ATMI’s NOWPak technology, allows for removal of headspace gas prior to dispensing, while preventing solvent loss and isolating chemicals from drive gas contamination. The tool minimizes misconnects through an ergonomic connector design, a locking closure combined with either a mechanical key-code or ATMI’s nowTRAK RFID chemical management system.

“We worked in collaboration with TEL to integrate the package into the photoresist process, recognizing that packaging solutions need to play an active role in the handling and dispensing of critical materials,” said Dan Nelson, vice president and general manager, ATMI Packaging.


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