February 6, 2006 – Celerity Inc., Milpitas, CA, a privately held provider of gas and chemical delivery process modules, has purchased the gas delivery product line of Entegris Inc., for $15.6 million in cash.

The business includes recently acquired Mykrolis’ mass flow controllers, vacuum gauges, pressure transducers, and other components used in the manufacturing of semiconductors and other electronics. Celerity also will assume ownership of a manufacturing facility in Allen, TX, and service centers in Shanghai and Taiwan.

The deal represents the last of three noncore business unit divestitures announced in December, in an effort to focus on the company’s core materials integrity management lines. In December Entegris sold its tape-and-reel product line, and line of ESC stainless steel clean-in-place equipment for life science applications, for a net loss of about $3.9 million net of taxes, plus as-yet undetermined asset impairment charges. The three product lines had aggregate historical combined revenue of approximately $50 million, or 8% of total sales, and were not currently profitable.