Feb. 9, 2006 — Tegal Corp. (Nasdaq: TGAL) announced that a leading wireless component supplier has placed a multiple system order for 901ACS diode plasma etch systems.
The three new systems, valued at over $1 million, will expand the supplier’s existing production capacity in gallium arsenide semiconductors, which are widely used in wireless communications products, according to Tegal. The last multiple system order from this customer occurred in July 2004.
Tegal’s 900ACS series is intended for a wide variety of applications, including pad, zero layer, non-selective nitride, backside and planarization, as well as oxide, nitride, poly and compound materials applications.