Court grants stay in Nano/KLA patent spat

March 21, 2006 – A US District Court in Northern California has granted Nanometrics Inc.’s motion for a stay in a patent litigation case brought by KLA-Tencor Corp. in August 2005. Nano had filed for reexamination of the two patents at issue, involving a spectroscopic scatterometer system; KLA has subsequently added a third patent to the complaint, which also falls under the stay issued by the court.


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.