IMEC installs SUSS systems

Mar. 28, 2006 – SUSS MicroTec, a manufacturer of probe systems used to characterize semiconductor devices at wafer level, has installed its latest 300mm technology in wafer probe systems at the nanoelectronics research center IMEC in Leuven, Belgium.

Both PA300PS ProbeShield semiautomatic probe systems with ReAlign and ContactView technology and PA300 probe systems for RF-noise and S-parameter measurements have been installed. An agreement has been made for further collaboration on enhancing 300mm probe systems in the following years, the company said.

In addition, SUSS said it would deliver a second vacuum probe system to IMEC. The manual system is intended to complement an existing semiautomatic vacuum system, which is currently being used to test the reliability of MEMS devices at wafer level. The systems allow a device to be tested before packaging.


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