Mar. 16, 2006 – Nanometrics Inc. (Nasdaq: NANO), a supplier of advanced integrated and standalone metrology equipment to the semiconductor industry, announced that it has acquired privately-held Soluris Inc., an overlay metrology company headquartered in Concord, Mass.

Total consideration to purchase all the outstanding stock and to retire all the outstanding debt of Soluris was $7 million in an all-cash transaction.

Soluris was formed in 2003 through a management buyout of certain optical and electron metrology assets of the Schlumberger Ltd. semiconductor group. Their flagship product, the IVS 155, is a tool for 200mm semiconductor overlay and CD measurement. Soluris’ overlay equipment has been in the market for more than 20 years, with an installed base of over 150 systems worldwide.

The company also brings a compelling portfolio of intellectual property, including not only the overlay and CD measurement technology but also significant patents in the CD-SEM arena, according to a news release. Nanometrics’ acquisition of Soluris adds 37 employees in the U.S., Europe and Asia and is expected to contribute annual revenues of approximately $8 million to $10 million.