Entegris fires back vs. Pall filter suit

April 6, 2006 – Materials systems supplier Entegris Inc., Chaska, MN, has filed a lawsuit against filter manufacturer Pall Corp. alleging known misuse of patented technology in certain filtration separation products.

The suit, filed in US District Court in Massachusetts, alleges that Pall’s PhotoKleen EZD filter assembly line infringes Entegris patents covering technology used for point-of-use photochemical dispense and filtration in semiconductor manufacturing.

The companies have been disputing the patents since 2003, litigation inherited by Entegris’ merger last year with Mykrolis. Pall filed its own patent infringement suit against Entegris earlier this year over the same technologies.


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