Akrion sues over megasonic cleaning patents

May 26, 2006 – Akrion Inc., Allentown, PA, has filed a lawsuit against Product Systems Inc. (“Prosys”) alleging infringement of patents related to megasonic cleaning technology.

The company alleges that Prosys’ sale of certain single-wafer megasonic cleaning products and megasonic batch processing systems infringe one or more of Akrion’s patents. Akrion also is filing various counts of “unfair competition practices” related to such tool sales.


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