Litho costs won’t limit Moore’s Law, but technology is the key

Bob Haavind, Editorial Director, Solid State Technology

Examining the history of lithography over the past two decades suggests that the choices ahead are similar to those that were successfully made in the past, suggested Kazuo Ushida, Nikon Corp., in his presentation on “Cost-effective lithography” at The ConFab.

Comparing the future litho contenders in 2006, after reexamining the options considered in 1999, Ushida concluded that it looks like “d


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