Varian, Nissin Ion settle patent spat

May 12, 2006 – Varian Semiconductor Equipment Associates Inc., Gloucester, MA, and Japan’s Nissin Ion Equipment Co. Ltd. have settled patent litigation in a Texas court, with no admission of infringement or payment by Nissin.

The two patents relate to an ion beam scanning method and apparatus, and high-speed movement of workpieces in vacuum processing. Varian originally filed the suit in June 2004, asking for damages and injunctions against Nissin.


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