June 8, 2006 – Veeco Instruments Inc. (Nasdaq: VECO) announced the introduction of its new automated Wyko NT3300 Optical Profiler with DMEMS, or dynamic MEMS, measurement option.

With an increase in the number of unique micro-devices being used in consumer products, the company said the MEMS industry requires metrology tools that can perform both static and dynamic characterization easily and rapidly. “Veeco’s automated NT3300 DMEMS system fills this need, enabling manufacturers to accelerate both product reliability and functional development while driving down costs,” said Jeannine Sargent, executive vice president and general manager of metrology and instrumentation, in a prepared statement.

The DMEMS system utilizes a proprietary stroboscopic illuminator and synchronization electronics package that permits the capture of a series of 3D measurement data, generating a video of the sample device as it cycles through its range of motion. MEMS-focused Wyko Vision software locates features of interest and performs a wide variety of detailed 3D analyses, from determining resonant frequency and shape/distortion to characterizing deflection and other key device parameters.

Other features of the Wyko NT3300 DMEMS optical profiler include angstrom-resolution measurement of features from 0.1 nm to 2 mm in height, a programmable X/Y stage and software for rapid measurement of large surface areas, the ability to ramp intensity to investigate materials with differing reflectivities, and tip/tilt built into the head to eliminate the need to reposition the probe for successive scans.