July 5, 2006 — Balazs Analytical Services, a division of Air Liquide Electronics U.S. LP, introduces a full-range Surface Molecular Contamination (SMC) analyses, expanding its expertise and services offered with respect to Airborne Molecular Contamination (AMC) testing. SMC Analysis is used to evaluate final product surfaces and cleanroom materials that may contribute contaminants to the process.
Rich Jahr, president of Air Liquide Electronics U.S. LP, said, “The introduction of this program demonstrates Balazs’ understanding and innovative approach to provide solutions for the industry. Balazs experts are currently contributing to the development of new industry standards for surface contamination.”
Manufacturers of silicon wafers, disk drives, and flat panel displays use SMC Analysis to evaluate problems including delamination, metrology errors, gate oxide integrity, unwanted doping and ultimately yield loss. Additionally, Balazs exposes wafers to cleanroom materials including floor tiles, benches, plastics, and FOUPs and Pods. These results allow customers to qualify materials before purchase and installation or pinpoint the root cause of an existing contamination problem. Understanding SMC in the cleanroom contributes to overall process and product quality.
Alexandre Tremblot, general manager of Balazs Analytical Services, remarked, “While AMC identification remains a great tool to prevent significant yield issues, SMC represents a refined approach. It connects the dots between a contamination source and its ultimate impact on the product being manufactured.”
With capability to identify contamination from ~ 2-30 Angstroms, SMC Analysis surpasses current contaminant testing techniques and detects issues not related to particles. The combination of SMC Analysis results and Balazs’ expertise allows identification and elimination of the true contamination source.
SMC Analysis evaluates organics, dopants and metals with detection limits that surpass the 2005 ITRS roadmap guidelines, and is available to customers throughout the world.
Balazs Analytical Services, a division of Air Liquide Electronics U.S. LP, operates ISO 17025 certified laboratories that specialize in identifying ultra-low level contamination. Balazs’ expertise covers solids, liquids and gases used in the electronics and other high-tech industries. With every analysis, Balazs brings over 30 years of experience to help engineers control their process. Balazs laboratories are located in Dallas, TX; Fremont, CA; Fishkill, NY; and Paris, France.
Present in more than 70 countries, Air Liquide is the world leader in industrial and medical gases and related services. The Group offers innovative solutions based on constantly enhanced technologies. These solutions, which are consistent with Air Liquide’s commitment to sustainable development, help to protect life and enable our customers to manufacture many indispensable everyday products. Founded in 1902, Air Liquide has nearly 36,000 employees. The Group has successfully developed a long-term relationship with its shareholders built on trust and transparency and guided by the principles of corporate governance. Since the publication of its first consolidated financial statements in 1971, Air Liquide has posted strong and steady earnings growth. Sales in 2005 totalled 10,435 million euros, with sales outside France accounting for almost 80%. Air Liquide is listed on the Paris stock exchange and is a component of the CAC 40 and Eurostoxx 50 indices (ISIN code FR 0000120073).
For further information, please contact:
Air Liquide USA LLC Corporate Communications
Diane Labelle (713) 624-8082
Michael Rosen (713) 624-8023