Akrion books more GAMA wet station orders

July 5, 2006 – Akrion Inc. of Allentown, Pa., announced receipt of orders for GAMA Series systems from two repeat customers. Both tool sets will ship in the third quarter, the company said.

One of the systems will be used for back-end-of-line (BEOL) cleaning at a leading foundry in China. GAMA solvent cleaning tools utilize proprietary gas injection technology designed to eliminate corrosion and remove side wall polymers to yield more usable devices.

The company said the other system will be used for nitride etching by a top-tier European device manufacturer’s fabrication plant in Texas. Features available for GAMA nitride etch wet stations include Akrion’s “feed and bleed” technology designed to enhance etch uniformity and extend bath life for lower cost of ownership.

Akrion provides single-wafer and batch-immersion cleaning systems for the semiconductor industry. The company’s products are used in the production of a diverse range of semiconductor and related devices, including integrated circuits for DRAM, flash, logic and MEMS and photomasks.

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