Austriamicrosystems orders Pegasus DRIE tool from STS

July 5, 2006 – Surface Technology Systems plc (STS), a Newport, Wales-based maker of plasma process technologies required in the manufacturing and packaging of MEMS and advanced electronic devices, announced that Austriamicrosystems has purchased one of its VPX Pegasus Deep Reactive Ion Etch (DRIE) systems for advanced IC production.

The VPX Pegasus system selected combines a DRIE processing capability with a Brooks cluster core that can accommodate up to three process chambers.

Martin Schrems, director of process development and implementation at Austriamicrosystems, said in a prepared statement that the company chose the tool due to its flexibility and process performance. He said the cooperation with STS would enable his company to further enhance its position in analog technologies and products with special emphasis on high voltage and sensors applications.


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