Entegris, Miraial settle wafer carrier patent spat

July 26, 2006 – Entegris Inc. and Japanese firm Miraial Co. Ltd. (formerly Kakizaki Manufacturing Co. Ltd.) have settled litigation over disputed patents concerning 300mm semiconductor wafer handling technology. Terms of the deal, which Patrick McKinney, VP and GM of Entegris’ wafer handling business unit called “in the best interests of both of our companies,” were not disclosed.

Entegris initially filed the suit in June 2005 in the US District Court for the Southern District of New York, citing infringement on five US patents included in its 300mm front-opening wafer carrier technology. At the time Entegris claimed it was owed back royalties amounting “well into the millions of dollars,” after two years of failed negotiations.


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