Rudolph Technologies begins shipping next-generation wafer inspection system

Leading U.S. flash memory manufacturer embraces all-surface inspection methodology for QA process

June 26, 2006 — Flanders, NJ — Rudolph Technologies, Inc. (NASDAQ: RTEC), a leading provider of process control equipment for thin film measurement and macro defect inspection, including data analysis software solutions, today announced the first shipment of an advanced all-surface macro defect detection system to a leading U.S.-based flash memory manufacturer. The system, which will be installed in a quality assurance environment, combines the wafer frontside inspection capability of the fast, new AXi(tm) 935 Macro Defect Inspection tool with the edge inspection capability of the recently-introduced E25(tm) Wafer Edge Inspection module.

“The AXi 935 is the next generation in the AXi line, complementing the widely adopted AXi 930, and offers significantly higher throughput while still maintaining the high resolution advanced macro inspection capability customers have come to rely on,” said Ardy Johnson, vice president of marketing for Rudolph. “The combination of the AXi 935 and E25 on a single platform accommodates automatic inspection of both the front surface and edge of the wafer in a single system without significantly impacting inspection throughput. The inspection data can be fed forward for automatic disposition of both wafers and die for quality assurance.”

The E25 Wafer Edge Inspection module includes several new and enhanced features including brighter illumination, increased surface coverage, simplified recipe creation and improved detection algorithm for edge chips and cracks.

All-surface macro defect inspection, used in wafer manufacturing and final manufacturing processes, has seen rapid acceptance since its recent introduction. Modules are also available for wafer backside inspection.

About Rudolph Technologies, Inc.
Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology, defect inspection and data analysis systems used by semiconductor device manufacturers. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market. The company has enhanced the competitiveness of its products in the marketplace by anticipating and addressing many emerging trends driving the semiconductor industry’s growth. Rudolph’s strategy for continued technological and market leadership includes aggressive research and development of complementary metrology and inspection solutions. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company’s web site at .

Safe Harbor Statement
This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the “Act”). In some cases, you can identify those so-called “forward-looking statements” by words such as “may,” “will,” “would,” “should,” “expects,” “plans,” “anticipates,” “believes,” “feels,” “estimates,” “predicts,” “potential,” or “continue,” or the negative of those words and other comparable words. Rudolph wishes to take advantage of the “safe harbor” provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Rudolph’s control. Factors that could cause actual results to differ materially from the expectations expressed in such forward-looking statements, include, but are not limited to, the impact of the slowdown in the overall economy, the uncertainty of the current global political environment, the potential for terrorist attacks, the potential for business disruptions due to infectious diseases, changes in customer demands for our existing and new products, the timing, cancellation or delay of customer orders and shipments, the timing of revenue recognition of shipments, new product offerings from our competitors, changes in or an inability to execute Rudolph’s business strategy, unanticipated manufacturing or supply problems and changes in tax rules. Rudolph cannot guarantee future results, levels of activity, performance, or achievements. The matters discussed in this press release also involve risks and uncertainties as summarized in Rudolph’s Form 10-K report for the year ended December 31, 2005 and other filings with the Securities and Exchange Commission (“SEC”), which are available at , the SEC’s website, and at , the Rudolph website. While these factors may be updated from time to time through the filing of reports and registration statements with the SEC, Rudolph does not assume any obligation to update the forward-looking information contained in this press release.

For more information, please contact:

Steven R. Roth
[email protected]

Trade Press:
Virginia Becker
[email protected]

Sandy Fewkes
MindWrite Communications, Inc.
Ph: 408-224-4024
[email protected]


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