July 28, 2006 – Ultra Clean Holdings Inc., Menlo Park, CA, and Mattson Technology Inc., Fremont, CA, have signed a partnership deal whereby Ultra Clean will integrate and test critical subsystems on Mattson’s advanced strip and rapid thermal processing (RTP) tools. Financial terms of the deal were not disclosed.
Frank Kohoutek, VP of operations for Mattson, said the partnership will reduce time-to-market for the company’s tools.
Ultra Clean’s Systems and Service division has been involved in patent infringement litigation against Celerity Inc. since Sept. 2005 over fluid distribution technology used in process control for semiconductor manufacturing and related industries. The unit was founded in 1991 as a subsidiary of Mitsubishi Corp., and acquired by Ultra Clean Holdings in Nov. 2002.