Aug. 2, 2006 – RASIRC, a steam purification company, announced that Rogue Valley Microdevices has purchased four RASIRC Intaeger UHP systems to install in its facility in Medford, Oregon. The systems will be used to generate the ultra high purity water vapor used for wet oxide growth. The Intaeger UHP is the first commercial technology that can purify steam from de-ionized water.
Rogue Valley Microdevices is a wafer foundry that grows oxide and nitride films on silicon wafers. Prior to purchasing the Intaeger System, Rogue Valley was using a heated water bubbler with an oxygen carrier gas. The companies say the Intaeger UHP system delivers more water vapor to the process than the bubbler and eliminates the need for a carrier gas. By eliminating the carrier gas and increasing the amount of water vapor, the company says it can now reduce process time.