Tegal nets repeat orders for 900 series etcher

Aug. 28, 2006 – Tegal Corp., a designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits and nanotechnology devices, announced that two leading Japanese companies had placed repeat orders for Tegal 900 series plasma etch systems. Tegal says it has shipped more 1500 systems of this type to global semiconductor fabs since its introduction.

The Tegal 900 series etch tool features an RF diode plasma source optimized for the etching of a wide variety of films. The flexible, automated wafer handling system, a compact footprint and a broad portfolio of processes enable the 900 series etchers to be widely used in multiple sectors, including silicon CMOS, integrated passives, MEMS devices and thin film head manufacturing.

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