October 4, 2006 – Air Products says it will build a new nitrogen trifluoride (NF3) plant adjacent to existing facilities in Ulsan, South Korea, to support growing demand from domestic manufacturers of semiconductors and liquid-crystal displays. Phase One of the new site will ramp to around 500 metric tons/year by late 2007, accounting for about 20% of the company’s projected NF3 global output of 2500 metric tons/year.
NF3, a stable and nonflammable gas, is used in chamber cleaning processes for manufacturing semiconductors, flat-panel displays, and other electronic devices. Air Products says it significantly reduces in emissions and increases throughput by up to 30%, resulting in longer chamber life and faster clean rates.
“This new manufacturing facility is part of a multi-year investment strategy to build on our leading specialty materials position and enhance our ability to serve our semiconductor and TFT-LCD customers anywhere in the world,” stated Mike Hilton, VP and GM, Electronics and Performance Materials, Air Products.
Last year Air Products brought onstream an ultrahigh purity ammonia plant at its Ulsan location, complementing other sites in Shiwha, Banwol, Cheonan, and Pyeongtaek.