KLA-Tencor hires former VP, TEL exec as CTO

October 13, 2006 – KLA-Tencor Corp. has hired one of its own back as its chief technology officer. Ben Tsai will move from SVP of technology at Tokyo Electron Ltd. to become EVP and CTO at KLA-Tencor, where he previously was group VP and CTO of systems, and before that GM for the company’s wafer inspection division. Before the KLA-Tencor merger he held several positions at KLA Instruments. Tsai holds over 20 patents in the areas of inspection and metrology.

“I am very pleased to welcome Ben back to KLA-Tencor,” stated Rick Wallace, CEO of KLA-Tencor. “His more than 20 years experience at KLA-Tencor, combined with his overall expertise in the global semiconductor equipment industry, will be invaluable to the company.”


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