MEMS sensor firm adds 150mm line

October 11, 2006 – Silicon Microstructures, Inc. (SMI), a developer of silicon pressure sensors, says it has ramped to 40,000 sensors/day on a new 150mm MEMS manufacturing line. The new manufacturing line contains new equipment that enables more precise and clean cassette handling, etching, and depositions for higher performance and reliability.

SMI’s sensors are used in automotive, medical and heating, ventilation, and air conditioning (HVAC) markets, with applications ranging from low-pressure devices measuring human respiration to high-pressure devices designed for tire pressure monitoring systems (TPMS) and scuba diving air tanks.

“The demand for cost-effective, accurate pressure sensors is growing across multiple markets and our high-volume MEMS production is our response to this need,” said Jim Knutti, president of SMI, in a statement. “With SMI’s increased capacity, we continue to enable new MEMS markets and opportunities and expect to see steady growth over the long term.”


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