October 19, 2006 – In a move to provide better support for its legacy and discontinued tools, Novellus Systems Inc., San Jose, CA, has signed a nonexclusive licensing deal with Surplus Process Equipment Corp. (SPEC), to refurbish certain used Novellus systems, and build new systems to current Novellus specifications. Terms of the agreement were not disclosed.
Tools involved in the deal include Novellus’ Aura 1000/2000LL, AE 2001/2000LL, and L3510 photoresist strip and etch systems, as well as the GaSonics VHP line of high-pressure oxidation systems. All other 200mm and 300mm products from Novellus’ 2001 purchase of GaSonics International Corp., including the Gamma and PEP Iridia lines, will continue to be manufactured, sold, and supported by Novellus.
An earlier press release from SPEC suggested the company had acquired the entire GaSonics product line, but was quickly retracted, as the deal involves only licensing the technologies, and does not cover any GaSonics 300mm tools.