By Phil Naughton (Freescale Semiconductor Assignee), and Walter Worth, SEMATECH, Austin, Texas

The environment/safety/health (ESH) chapter of the International Technology Roadmap for Semiconductors (ITRS) outlines intrinsic ESH technology requirements such as energy conservation and ESH risk assessment. This article explores potential solutions, challenges, and opportunities for addressing these energy needs along with the ESH risk assessment challenges associated with the introduction of the many, new process materials.

Over the last 10 years SEMATECH and the International SEMATECH Manufacturing Initiative (ISMI), as well as the whole industry, have worked on energy conservation and many of the easy solutions have been implemented. The more advanced ideas, however, such as tool idle mode, require a collaborative effort by fab designers, tool suppliers and IC manufacturers, and the development of new tool standards, as discussed below. The article also reviews the increasing number of emerging global ESH regulations and outlines their impact on IC manufacturing. …