November 27, 2006 – Tokyo Electron Ltd. says it plans to release a new 300mm “high-productivity” version of its Clean Track Lithius coater/developer series in the fall of 2007.
The Pro model will include Ingenio GL, CD Optimizer, and immersion process modules, and also feature a more compact footprint and “improved equipment maintainability and reliability,” the company stated. Integrated metrology tools will enable “immediate” detection of abnormal conditions and process changes. Also, the tool will require less utility usage and chemical consumption.
“The introduction of the CLEAN TRACK LITHIUS Pro addresses our customers’ needs for increased productivity, higher reliability and compact size while incorporating all of the advanced technological capabilities of TEL’s proven CLEAN TRACK LITHIUS platform,” said TEL president Ken Sato, in a statement.