Tegal receives order for 6500 advanced etch system from Skyworks Solutions

Dec. 22, 2006 — Tegal Corp., a San Jose, Calif., designer and manufacturer of plasma etch and deposition systems, announced that it had received an order for an 6500 Advanced Etch cluster tool from Skyworks Solutions Inc.

The system will be shipped to Skyworks’ fab in Southern California and will be used to etch SiN and other critical thin-films on GaAs substrates. The devices produced on the 6500 system will be incorporated in a wide variety of wireless handset, automotive, broadband, cellular infrastructure, industrial and medical applications.

“The 6500 Advanced Etch system was selected on the basis of the unique capabilities of our innovative HRe- (High-density Reflected electron) source,” said Thomas Mika, Tegal president and CEO, in a prepared statement. “A key focus area for our company is the compound semiconductor space, which is seeing renewed growth due to the ubiquitous usage of wireless electronics.”

The 6500 etch system is a high-vacuum etch cluster tool and is used in production fabs to etch multiple thin films in an extremely clean process environment. These films are widely used in compound semiconductor and opto-electronics, non-volatile memory, analog and power devices and MEMS devices.

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