SEZ Taps Korean Market

(January 31, 2007) SEOUL, South Korea and VILLACH, Austria &#151 A major Korean semiconductor manufacturer placed an order with the SEZ Group for Da Vinci systems, to be used for back-end-of-line (BEOL) polymer removal. The four systems will perform aluminum/copper polymer cleans on 300- and 200-nm DRAM memory devices with sub-90-nm process technologies.


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