Jan. 23, 2007 — Vistec Semiconductor Systems, a Weilburg, Germany inspection and metrology equipment company, received orders for infrared inspection equipment from a Japanese sensor manufacturer and an European MEMS manufacturer.

A Japanese sensor manufacturer ordered two fully automated infrared inspection and review systems IRIS2000, worth more than a million Euro. Vistec Semiconductor Systems GmbH, previously Leica Microsystems Semiconductor GmbH, delivered the first tool in December 2006. The IRIS2000 will be used to control glued wafers in the customer’s production. Infrared inspection can detect defects which are not visible by other illumination methods.

“Our reliable inspection system offers process engineers a tool to identify defects located in the glueing layer between the wafers”, explains Product Manager Andreas Machura. The IRIS2000 will be used in a production line where each sensor must be inspected. The high throughput of up to 12,000 dies per hour was a decisive factor for the Japanese customer to choose the infrared inspection and review system.

Vistec also received orders for two INM100 IR infrared inspection systems from a European MEMS manufacturer. The customer will use one system each for production and defect analysis.

The INM100 IR has an IR optimized illumination and optics. “But the system doesn’t only provide best results in the infrared spectrum. It can be operated as a conventional microscope, too, which increases the value for the customer”, adds Machura. The INM100 IR can also be used to control the quality of the overlay of flip chip and wafer level packaging technologies.