AMAT plasma doping may replace implanters

by Ed Korczynski, Senior Technical Editor

As recently reported in WaferNEWS, Applied Materials has decided to stop developing new beam-line implant tools, though it will still support and manufacture already developed systems. But this is by no means the end of the company’s implant technology development — in fact, it likely tells of the imminent deployment of technology patiently developed over the last 18 years: plasma doping.


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