Axcelis wins major follow-on order for dry strip tools

Leading memory manufacturer orders over 10 RadiantStrip systems based on demonstrated reliability and process flexibility

February 7, 2007 — /BUSINESS WIRE/ — BEVERLY, Mass. — Axcelis Technologies, Inc. (NASDAQ: ACLS) has received a significant follow-on order for over 10 RadiantStrip 320 photoresist dry strip systems from a major memory device manufacturer. Designed for 300mm front-end-of-line cleaning applications, the dual-chamber systems will be used in the customer’s fabs at multiple global sites supporting high-volume device production. The systems will begin to ship in the first quarter.

The RadiantStrip 320 has been adopted by customers worldwide for its ability to effectively address a wide range of post-implant and post-etch cleaning applications, including the fast, complete and uniform removal of heavily implanted photoresist.

“Our customer’s order for multiple RadiantStrip 320 systems confirms our platform’s long track record of reliability and process versatility in the most demanding environments,” said Mary Puma, chairman and CEO of Axcelis. “It is ideally suited to their diverse production requirements, supporting multi-temperature stripping and heavily implanted photoresists. This ensures high productivity and compatibility with current and next-generation materials.”

Axcelis designed the RadiantStrip 320 for dependability and productivity in high-volume, low cost-of-ownership manufacturing environments. The machine offers a modular and scalable platform for bulk photoresist strip, advanced polymer removal and complete dry clean processes in the same chamber.

About Axcelis Technologies, Inc.
Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis also licenses its 50% owned joint venture, SEN Corporation, an SHI and Axcelis Company, to manufacture and sell certain implant products in Japan. The company’s Internet address is:

Company Contact:
Axcelis Technologies, Inc.
Maureen Hart, +1-978-787-4266
Fax: +1-978-787-4275
[email protected]
Investor Contact:
Axcelis Technologies, Inc.
Steve Bassett, +1-978-787-4000
Fax: +1-978-787-9133
[email protected]
Agency Contact:
Loomis Group
Heather Smith, +1-617-638-0022
Fax: +1-617-638-0033
[email protected]


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