BOC Edwards donates dense fluid processor to MassNanoTech Institute

Gift of semiconductor wafer chamber and associated pumps to help further the research facility’s mission to move nanotechnology from laboratory to manufacturing

February 12, 2007 — /BOC EDWARDS/ — WILMINGTON, MASS — BOC Edwards, a leading supplier of vacuum, abatement, chemical management equipment and services to the world’s semiconductor OEMs and fabs, announced today that it has donated one DFP 200 Dense Fluid Processor High-precision Advanced Wafer Chamber System and associated pumps, valves and other components to the MassNanoTech Institute. The University of Massachusetts Amherst’s campus-wide initiative for nanoscale science and engineering.

The donation will be used by the MassNanoTech Institute in support of its educational and research programs under the auspices of the Center for Hierarchical Manufacturing.

“BOC Edwards is interested in supporting the local community and universities whenever possible,” said Phil Blakey, US semiconductor president, BOC Edwards. “This donation is meant to assist in furthering education and technological innovation.”

“We are pleased to accept this generous donation from BOC Edwards,” said James Watkins, director, MassNanoTech Institute. “One of the goals of the MassNanoTech Institute is to fabricate new nanoscale devices and collaborate with industry in the development of prototypes and new technology. This equipment will assist in our R&D programs that are focused on moving nanotechnology from the laboratory to manufacturing.”

About BOC Edwards
A member of The Linde Group, BOC Edwards employs around 4600 people and is a leading supplier of integrated solutions for the manufacture of microelectronic devices, including semiconductors and flat panel displays. Partnering with fabs, foundries and process tool manufacturers, BOC Edwards provides process-enabling subsystems that are supported by best-in-class operations and maintenance services for its global customer base.

The Linde Group is a world leading industrial gases and engineering company with more than 53,000 employees working in around 70 countries worldwide. Following the acquisition of The BOC Group the company has gases and engineering sales of approximately 12 billion euro. The strategy of The Linde Group is geared towards earnings-based growth and focuses on the expansion of its international business with forward-looking products and services. For more information, please see The Linde Group online at

Specific information on BOC Edwards can be found at .
E-mail inquiries can be sent to [email protected] .

About MassNanoTech
The MassNanoTech Institute is the University of Massachusetts Amherst’s campus-wide initiative for nanoscale science and engineering. The campus has built a strong reputation for innovation in nanoscale research, with breadth across many departments. Over 50 faculty investigators from eight departments in three colleges are working in the field of nanotechnology, generating over $36 million in research funding since 1997 from a variety of federal and industry sources. Ongoing efforts include multiple prestigious NSF awards, licensing of key technology, acquisition of specialized characterization equipment, and the education and training of many talented graduate students working on innovative technologies in individual faculty labs. MassNanoTech provides a single point of contacts for academic and industrial collaborators.

For more information, please see


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