Epson selects mask aligner from SUSS MicroTec

Feb. 6, 2007 — Seiko Epson Corp. (Epson), has purchased a MA200 Compact Mask Aligner from SUSS MicroTec , a supplier of precision manufacturing and test systems, to support Epson’s Wafer Level Chip Scale Packaging (W-CSP) production. SUSS reports that after a careful evaluation of competitive systems, Epson decided on SUSS’ MA200Compact Aligner because it demonstrated excellent throughput and a submicron overlay and alignment accuracy. In addition, the company states that it’s MA200Compact has been optimized for advanced thick chemically amplified positive tone resists that allow for ninety degree resist profiles. The system that was purchased during the fourth quarter of 2006 will be delivered to Epson’s facility in Japan.

Mask aligners are proximity printing tools where mask and wafer are separated by an exposure gap in the range between 20 and 100 microns. Proximity aligners offer a low cost lithography solution for high volume production.

“The spirit of creativity and challenge is at the heart of Epson’s corporate ethos”, comments Akira Makabe, General Manager of Advanced Technology Development Center at Epson. “To keep up with the creation of unique technologies and skills we are constantly seeking for innovative equipment solutions. We chose SUSS MicroTec’s MA200Compact, because it combines proven mask aligner technology with highest resolution, submicron overlay accuracy and an excellent wafer yield. The SUSS MA200Compact was able to meet even our most demanding performance criteria.”

Rolf Wolf, managing director of SUSS MicroTec’ lithography division, noted, “We are pleased that one of the world’s most innovative companies in the digital image sector has selected the SUSS MA200Compact to support its Wafer Level Chip Scale Packaging production. SUSS is excited to be participating in the remarkable progress that is currently being made in Wafer Level Packaging manufacturing. This order further solidifies SUSS’ position as the leading supplier of production mask aligner systems.”

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