Air Liquide Electronics thinks outside the fab for copper cleaning applications

March 20, 2007 — /BUSINESS WIRE/ — HOUSTON & DALLAS — Air Liquide Electronics U.S. LP announces the recent commissioning of a new Chemical Mechanical Planarization (CMP) applications and development laboratory near its Dallas, Texas headquarters. The new facility, a multi-million dollar investment by the company, focuses on the CuClean family of post CMP copper clean chemistries, as well as other innovative CMP solutions.

Chemical Mechanical Planarization is a semiconductor manufacturing process that uses slurries consisting of abrasive particles and ancillary chemicals to clean and condition semiconductor wafers during the fabrication of integrated circuits. Post CMP cleaning is a subsequent step that removes organic and particulate contaminants that remain on the wafer surface from the CMP process.

The new facility features an industry-standard 200 mm integrated polisher/cleaner tool and associated surface and chemical metrology equipment. The CMP platform is equipped with multiple distribution lines for slurries and cleaning chemistries used to assist in evaluating materials and consumables as well as customer processes. These tools and the expert capabilities available at the facility give customers access to engineered solutions to their CMP needs without significant impact to ongoing operations, enabling them to test real time solutions and benefit more quickly from potential cost savings. The facility offers Air Liquide Electronics opportunities to work mutually with customers to develop valuable manufacturing products and solutions.

Said Rich Jahr, president of Air Liquide Electronics U.S. LP, “A fundamental feature of this new facility is our ability to offer custom engineered clean formulations to the market faster, helping customers take immediate advantage of performance and cost efficiencies. Customers now have access to engineered solutions outside of their fab, while keeping their tools and manufacturing operations in full production.”

The tools and capabilities at this new facility have been assembled to provide credible data on an industry standard platform, replicate customers’ current and next generation CMP fab processes and optimize customers’ clean processes. The facility also leverages the leading capabilities of Air Liquide’s Balazs Analytical Services division to improve performance verification of customer products.

For additional information on Air Liquide Electronics’ CMP offerings, contact: [email protected]

Air Liquide Electronics U.S. LP is the Dallas, Texas based subsidiary of American Air Liquide Holdings, Inc. responsible for serving the semiconductor industry in the U.S. It serves the semiconductor industry in the U.S. by providing ultra pure gases, liquids and advanced molecules used in the fabrication of silicon chips, as well as providing specialized equipment and related gas and chemical management services. Through its Balazs Analytical Services division, Air Liquide Electronics also provides state-of-the art analytical and laboratory services. American Air Liquide Holdings, Inc. is the U.S. subsidiary of Air Liquide Group responsible for its U.S. operations.

Present in 72 countries, Air Liquide is a world leader in industrial and medical gases and related services. The Group offers innovative solutions based on constantly enhanced technologies. These solutions, which are consistent with Air Liquide’s commitment to sustainable development, help to protect life and enable our customers to manufacture many indispensable everyday products. Founded in 1902, Air Liquide has more than 36,000 employees. The Group has successfully developed a long-term relationship with its shareholders built on trust and transparency and guided by the principles of corporate governance. Since the publication of its first consolidated financial statements in 1971, Air Liquide has posted strong and steady earnings growth. Revenues in 2006 totalled 10,949 million euros, with sales outside France accounting for almost 80%. Air Liquide is listed on the Paris stock exchange and is a component of the CAC 40 and Eurostoxx 50 indices (ISIN code FR 0000120073).

Air Liquide USA LLC
Corporate Communications
Diane Labelle, 713-624-8082
Michael Rosen, 713-624-8023


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