BOC Edwards, a leading supplier of semiconductor equipment and services, recently donated a dense fluid processor system to the MassNanoTech Institute, a campuswide nanoscale science and engineering initiative at the University of Massachusetts-Amherst.
The DFP 200 is a high-pressure, single-wafer process module that can process 200 mm wafers in dense or supercritical carbon dioxide (scCO2) for cleaning, stripping, deposition, drying and lithography applications. According to Phil Blakey, U.S. semiconductor president, BOC Edwards, the “donation is meant to assist in furthering education and technological innovation.”
The MassNanoTech Institute will utilize the new equipment in educational and research initiatives under the guidance of the Center for Hierarchical Manufacturing (CHM), a program that UMASS established through a five-year, $16 million grant from the National Science Foundation. The center’s mission is to “move nanotechnology from laboratory innovation to manufacturable components and devices.”
“One of the goals of the MassNanoTech Institute is to fabricate new nanoscale devices and collaborate with industry in the development of prototypes and new technology,” said James Watkins, director of MassNanoTech Institute. “This equipment will assist in our R&D programs that are focused on moving nanotechnology from the laboratory to manufacturing.”