Getter Services for MEMS WLP

Vacuum is typically required for IR emission and sensing, resonant oscillators in biological or chemical applications, and other MEMS devices. The proprietary IMT getter is used for deposition on 150-mm and smaller wafers in the company’s Class 100 clean room. Adding to IMT’s MEMS-manufacturing services is in response to an industry-wide demand in a range of wafer-level products, said John Foster, CEO.

(April 20, 2007) TAIPEI, Taiwan &#151 Nan Ya PCB Corporation added an additional line to its flip chip substrate production capacity, increasing output to 30 million units monthly. The line will produce seven million units, reports Taiwan’s China Economic News Service (CENS).


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