VLSI Standards upgrades 300mm resistivity standards

April 20, 2007 – VLSI Standards Inc. has released a 300mm version of its Resistivity Calibration Standards, which enable user calibration and monitoring of automated 300mm four-point probes and other noncontact sheet resistance measurement tools.

The NIST-traceable resistivity standards — base silicon wafers, p-type (Boron) doped to 0.02-10 ohm.cm resistivity — add a layer of process yield security by ensuring that tools are accurate and repeatable, the group said in a statement, noting that previously 300mm tool users relied on smaller wafer versions and manually loaded standards to perform calibration routines.

“200mm to 300mm bridge tools have long been phased out, making the calibration of 300mm probes a burden,” said Marco Tortonese, president of VLSI Standards, in a statement. “The release of the 300mm Resistivity Standards should go a long way to support our leading edge customers.”


Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.