May 2, 2007 – Air Products says it recently completed expansion of nitrous oxide (N2O) capacity at its plant in Nanke, Taiwan, doubling N2O output for semiconductor and flat-panel display (TFT-LCD) customers in Asia.
The company says the expanded capacity is “an exact duplicate” of existing production capabilities, with the same raw material supply and process monitoring. The company also provides high-purity N2O through use of an adsorption unit and purifier.
N2O is used with silane for CVD of silicon nitride layers, used as passivation, masking, or insulating layers. It’s also used for plasma deposition of fused silica glass as a low-k dielectric insulating film between adjacent metal lines.