May 23, 2006 – Five of the “Common Platform Alliance” partners — IBM, Chartered, Samsung, Infineon, and Freescale — say they will extend their current technology development agreements through 2010 and beyond, incorporating 32nm bulk CMOS process technologies and joint development of process design kits.
Working on 32nm technologies will include implementation of new materials such as high-k/metal gate, advanced stress engineering, and extreme low-k films in the back-end-of-line (BEOL), as well as immersion lithography. The alliance partners also aim to support “derivative” technologies such as RF CMOS and embedded DRAM.
The announcement only focuses on CMOS technology, noted Gary Patton, VP of technology development for IBM’s semiconductor research development center in East Fishkill. He explained that IBM already has extended its high-performance SOI technology alliance with AMD and Freescale, and collaborates in fundamental advanced-process R&D with AMD, Freescale, Sony, and Toshiba, as well as work with Sony and Toshiba in support of the “Cell” microprocessor.
As with previous nodes, the 32nm development activities will be conducted at IBM’s 300mm semiconductor fabrication facility in East Fishkill, NY. Production qualification is slated for late 2009, with IBM’s partners moving into production “within one quarter” of IBM, according to Patton.
“Major new challenges are expected at the 32nm node, both in materials as well as device structures,” stated Oh-Hyun Kwon, president of the system LSI division within Samsung Electronics Co.’s semiconductor business. “We expect to deliver breakthrough technology by working together with our partners, who bring a variety of expertise as leaders in the industry.”
“The industry has recognized the value and importance of the collaborative model in driving robust, cost-effective solutions,” added Chia Song Hwee, president/CEO of Chartered. “As we now collaborate on our fourth node under this joint model, we have seen how each company brings unique strengths and expertise to drive a customer-centric offering. The results of our collaboration have served as a platform for providing customers with world-class, flexible sourcing solutions.”