Akrion sells “SCP” automated wet station for wafer cleaning

June 11, 2007 — /PRNewswire/ — ALLENTOWN, PA — Akrion, Inc., a leading supplier of semiconductor surface preparation equipment, today announced the sale of an E200 system for 200 mm semiconductor wafer cleaning to a fabrication plant in the United States.

This is the first system order engineered by Akrion’s Boise, ID, team. In October of 2006, Akrion purchased most of the assets and selected liabilities of SCP Global Technologies, Inc. (SCP), a manufacturer of batch-immersion tools.

The E200 will be used for photoresist strip and etch in the manufacturing of devices that will most likely be used in the production of consumer goods for a variety of end uses such as remote controls, portable computers, and various electronic devices used in the manufacturing of automobiles.

The E200 is a modular linear wet bench offering both traditional and innovative surface preparation solutions. Configurations are available for RCA cleans, nitride etch, and photoresist strip applications. E200 features include DynaFlow rinse tanks designed for DI water savings and optimized rinsing efficiency, and GreenDry(TM) dryers. GreenDry allows rinsing and drying in one tank in less than 10 minutes as well as chemical injection for surface conversion and critical etch in “true” HF Last processes.

The E200 software platform (System 4000XT) blends station control software with internet technologies. System 4000XT has many features that enable the customer to improve productivity and ease of use. The customer can log in remotely without the need for a third-party application such as remote desktop, RAdmin, and the like. This allows engineers and equipment managers the ability to manage the tool without the need to interrupt wafer processing.

About Akrion
Akrion is a leading provider of advanced surface preparation systems used in the manufacture of semiconductor devices. The company’s products, which include single-wafer and batch-immersion cleaning systems, are used in the production of a wide variety of semiconductor devices, including logic devices, analog devices, flash memory, DRAM, and MEMS and are used to clean bare silicon and test wafers as well as photomasks. Headquartered in Allentown, PA, Akrion’s Allentown production facility is ISO 9001:2000 and ISO 14001:2004 certified. For further information, please visit Akrion’s Web site: http://www.akrion.com/.

Source: Akrion, Inc.

James Whittle, CFO of Akrion, Inc.
Tel: 610-530-3358


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