Micro-tech R&D Facility Installs EVG Mask Aligner

(June 1, 2007) ST. FLORIAN, Austria and LYNGBY, Denmark &#151 EV Group (St. Florian) installed an EVG620 precision mask and bond aligner system at repeat-customer Danish Advanced Nanotech Center for Highly Integrated Production (DANCHIP) facilities at the Technical University of Denmark (DTU &#151 Lyngby). The machine will be used for research, education, prototyping, and small-scale production of micro- and nanotechnology.


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