June 27, 2007 — Tegal Corp., designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits, MEMS, and nanotechnology devices, has given $350,000 to establish the Peter J. Clarke Professorship for the Director of the California NanoSystems Institute (CNSI) at the University of California, Santa Barbara. The gift is being made by Sputtered Films Inc. a wholly owned subsidiary of Tegal. Professor Evelyn Hu, Director of the CNSI and Professor of Electrical Engineering and Materials in the College of Engineering at UCSB, holds the first appointment for the endowed chair.

“Tegal is establishing this endowed chair in order to honor the many contributions Peter Clarke, founder of Sputtered Films, Inc., and longtime Santa Barbara resident, made to UCSB during his lifetime,” said Thomas Mika, Chairman, President and CEO of Tegal. “The opportunity arose, in connection with our settlement of litigation surrounding some of Peter’s most important inventions, to acknowledge his key role in developing leading edge technology in use today throughout the micro and nano fabrication industries. This contribution, made on behalf of the Board of Directors and shareholders of Tegal, recognizes Peter Clarke’s pivotal role in advancing technology, his love of collaborative multidisciplinary scientific research, his deep bond with the campus, and his long and fruitful collaboration with Dr. Hu.”