Advanced Energy unveils Paramount RF power-delivery system

July 5, 2007 — Advanced Energy Industries Inc. has released its newest power platform: the Paramount RF-power delivery system. The company claims that the system offers significant power-delivery accuracy and control for complex film stacks and fine feature sizes. The new system promises accuracy and control at 13.56MHz fixed or variable frequencies and is able to keep pace in real time with the most abrupt plasma-impedance changes

The 3kW Paramount system supports etch and deposition processes in semiconductor, FPD, MEMS, and solar photovoltaic manufacturing.


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