July 17, 2007 — /PRNewswire/ — LEHIGH VALLEY, PA — Air Products and Fujifilm Electronic Materials U.S.A., Inc. today announced that they have signed a sole licensing agreement for the Air Products’ patented PDEMS(TM) interlayer dielectric (ILD) Process. The technology is designed to make a porous low-k dielectric material by plasma-enhanced chemical vapor deposition (PECVD).
The license agreement allows Fujifilm to supply the materials to semiconductor manufacturers that make use of Air Products’ patented PDEMS(TM) ILD Process.
The PDEMS(TM) ILD Process, developed by Air Products, is a breakthrough process for making a porous low-k dielectric material by PECVD. As claimed in US Patent numbers 6,583,048 and 6,846,515, the organosilicate structure of the film is created using a diethoxymethylsilane precursor, referred to as a “structure former.” Pores are imparted to the film by employing a hydrocarbon-based precursor known as a “porogen” that co-deposits during the growth of the film. Pores are created by removing the porogen using various post-treatment processes.
Under the license agreement, Air Products will continue to sell DEMS(TM) (diethoxymethylsilane) and porogens for use in the PDEMS(TM) ILD Process. Fujifilm Electronic Materials U.S.A. will sell its own D-MEOS(TM) (diethoxymethylsilane) and porogens for use in the PDEMS(TM) ILD Process. Both companies will interface directly with customers in selling the precursors used in the patented process.
“Our customers have challenged material suppliers to step up and help them continue the historical rate of roadmap progress. The creation of Air Products’ PDEMS(TM) ILD Process is a response to this challenge,” says Corning Painter, vice president of electronics for Air Products. “Our agreement with Fujifilm is a commitment by Air Products and Fujifilm to provide semiconductor manufacturers the ability to easily access this material technology anywhere in the world.”
“Fujifilm is committed to partnering with our customers to ensure that they have the enabling materials and processes they need to foster greater innovation,” says Keiji Mihayashi, president and CEO of FUJIFILM Electronic Materials U.S.A, Inc. “In addition to our existing broad product lines already supporting the semiconductor manufacturing and electronic materials markets, this license will allow for a new level of collaboration with our customers and OEM partners.”
About Air Products
Air Products serves customers in industrial, energy, technology and healthcare markets worldwide with a unique portfolio of atmospheric gases, process and specialty gases, performance materials, and equipment and services. Founded in 1940, Air Products has built leading positions in key growth markets such as semiconductor materials, refinery hydrogen, home healthcare services, natural gas liquefaction, and advanced coatings and adhesives. The company is recognized for its innovative culture, operational excellence and commitment to safety and the environment and is listed in the Dow Jones Sustainability and FTSE4Good Indices. The company has annual revenues of $9 billion, operations in more than 40 countries, and more than 20,000 employees around the globe. For more information, visit www.airproducts.com.
FUJIFILM Electronic Materials U.S.A. Inc. is a wholly owned subsidiary of FUJIFILM Corporation, with regional headquarters in Japan, United States and Belgium and several manufacturing and R&D facilities located worldwide. The company supplies advanced technology chemistry and delivery equipment to the semiconductor and flat panel display fabrication market. FUJIFILM Corporation brings continuous innovation and leading-edge products to a broad spectrum of industries including medical, life sciences, consumer electronic, chemical, graphic arts, information systems, photography and office products based on its vast portfolio of digital, optical, fine chemical and thin film coating technologies. It was ranked number 15 for U.S. patents granted in 2006, employs more than 75,000 people worldwide and in the year ended March 31, 2007, had global revenues of $23.6 billion. Fujifilm ADRs (American Depository Receipts) are traded in the U.S. on the NASDAQ exchange. For more information, please visit www.fujifilmholdings.com.
Source: Air Products and Chemicals, Inc.